In situ determination of nitrogen content in InGaAsN quantum wells

نویسندگان

  • O. Reentilä
  • M. Mattila
  • H. Lipsanen
چکیده

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Comparison of H2 and N2 as carrier gas in MOVPE growth of InGaAsN quantum wells

Differences in sample quality and nitrogen incorporation in InGaAsN quantum well samples grown by metal-organic vapor phase epitaxy using either H2 or N2 as the carrier gas are studied by several ex situ methods. The nitrogen incorporation increases while the indium content and the growth rate of the quantum wells decrease when using N2 as the carrier gas instead of H2. Also, the hydrogen incor...

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Title: In situ determination of nitrogen content in InGaAsN quantum wells

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تاریخ انتشار 2006